High Performance Filtration Products

Particle Counter KL-04

• Software allows automatic calibration
• Sensor resolution accuracy tolerance within 10% according to USP 25 <788> method
• Measurement range 1.3 to 100µm
• Integrated hard disk can store several years measurement data
• Data also can be stored in the integrated tape drive
• Selectable display language: English, German, French, Japanese
• Printer can be connected for the printout of the data

Particle Monitor KL-30A

• Monitors 0.05 μm particle contamination in DI water Integrated unit combines sensor, controller, flow meter, and data storage
• Lowest measurable particle size 0.05 μm and 20 times larger effective flow rate than former model
• Built-in leakage sensor triggers alarm output when internal leak detected
• High pressure up to 500 kPa (gauge pressure) applicable
• Equipped with D/A converter (4 - 20 mA) and alarm output contacts (standard)
• Printer built-in, CompactFlash card available (option)

Particle Sensor XP-L4

• Real-time monitoring of particle contamination in DI water
• Direct installation in DI water line for convenient process monitoring
• Two size channels: 0.05, 0.1µm and over (Four size channels are available as option: 0.05, 0.1, 0.15, 0.2 µm and over)
• D/A converter built-in as standard equipment
• Optional high-pressure check valve can be installed for high-pressure sample fluids
• Connection of optional printer DPU-414 possible

Particle Sensor KS-16

• Process monitoring at critical system points
• Integrated use in central chemical supply systems and wet benches
• Counting efficiency is 65% and higher
• Display, control and printout are possible with KZ-70
• Direct control by computer (using KZ-70 together is possible)
• Build up real-time monitoring system with the software of RP-monitor or KF-02A

Particle Sensor KS-18F

• Detects particles down to 0.05 um size, at a flow rate of 10 mL per minute
• Four particle size range (4 channels, factory default setting) ≥ 0.05 μm, ≥ 0.1 μm, ≥ 0.15 μm, ≥ 0.2 μm
• Integrated leak sensor with alarm output
• Sapphire flow cell
• User selectable channels within measurement range (using KE-40B1)
• Particle size resolution enhancement technology employed (patented)

Particle Sensor KL-28(B/BF)

• Two channel system, 0.2µm, 10mL/min
• For: water, organic solvent acid/alkali solutions, photoresists,HF(KS-28BF only)
• Maximum particle concentration : 1,200 particles/min (coincidence loss 5% or less)
• Dimensions : KS-28B/BF : 85(W) x 70(H) X 118(D)mm KE-28B/BF : 85(W) X 65(H) X 120(D) mm
• Weight : KS-28B/BF : Approx. 600 g KE-28B/BF : Approx. 400 g
  

Particle Sensor KS-41A

• 0.15um measurement in Photoresist, SOG (spin on glass), ARC (Anti-reflective Coating), and other high noise materials
• Proprietary Noise Reduction Technology allows for measurement below 0.2um for high noise materials
• Up to 10 selectable channels (0.15-1.0um)using KE-40B controller
• Built in Pulse Height Analyzer to characterize each chemistry and determine minimum measureable size
• Easy One touch operation for purge, measure, or combination modes (with KZ-30W2 Syringe Sampler)
• Built in Printer (using KE-40B Controller)
• RS-232 output

Particle Sensor KS-42A(F)

• High Detection Efficiency (0.1um and above)
• Up to 10 selectable channels (0.1-1.0um)using KE-40B controller
• Built in Pulse Height Analyzer
• Batch or In-line Operation
• Easy One touch operation for purge, measure, or combination modes (with KZ-30W2 Syringe Sampler)
• Built in Printer (using KE-40B Controller)
• RS-232 output

Particle Sensor KS-42B(F)

• Full Detection Efficiency (0.2um and above)
• Up to 10 selectable channels (0.2-2.0um)using KE-40B controller
• Built in Pulse Heght Analyzer (software required)
• LCD Touchscreen
• Batch or In-line Operation
• Easy One touch operation for purge, measure, or combination modes (with KZ-30W2 Syringe Sampler)
• RS-232 output

Particle Sensor KS-42C

• Minimum particle size of 0.5 um,sample flow rate of 10 mL/min
• Particle size range (7 channels, factory default setting) ≥ 0.5 um, ≥ 1.0um, ≥ 2.0um, ≥ 3.0um, ≥ 5.0um, ≥ 10um, ≥ 20um
• Leakage detector built-in
• Outputs alarm when internal leak detected
• Channel size change possible within range of sensor(using KE-40B)

Particle Sensor KS-42D

• Detects particles down to 2 um size, at a flow rate of 25 mL per minute
• Eight particle size ranges (8 channels, factory default setting) ≥2um, ≥3um, ≥5um, ≥7um, ≥10um,≥25um,≥50um, ≥100um (Up to 150 um available as option)
• Integrated leak sensor with alarm output
• User selectable channels within measurement range (using KE-40B function)